ENT-5 — Nanoindentation Tester
SKU: 202311-ENT-5-E-S
5th generation of Elionix
Nanoindentation Tester
High data reproducibility by suppressing disturbance in the measurement environment
“Made in Japan.”
Supports a wide range of test loads from 0.SµN to 2,000mN
Key Features
Applicable to variable kind of materials
- Thin film materials such as plating and hard films
- Resin materials, film materials
- Extremely thin film such as DLC
- Functional resin film and surface modification film
- Microparticles and powder materials
Nanoindentation test
- Mechanical properties such as hardness and elastic modulus of thin films, extreme surfaces, and minute regions can be obtained.
- Indentation observation is not required because the characteristics are obtained by analyzing the load-displacement curve.
- Compliant with ISO 14577-1/JIS Z 2255
Data reproducibility and maintainability
1. Temperature control mechanism
- Suppresses thermal expansion of samples and testing machines
- Temperature control inside the windshield at ±0.1℃
- Low thermal expansion material (nobinite) is used for measuring parts.
- Blocks the influence of external air currents
2. High precision positioning stage
- Adopted high-precision stage technology for electron beam lithography equipment developed in-house
- Positioning possible in 0.1μm steps
- Measuring any location with an observation magnification of 2,000x (when using a standard objective lens of 20x and digital zoom)
3. Anti-vibration mechanism
- High-precision wedge-shaped stage that is resistant to vibration
- Equipped with an active anti-vibration table as standard
4. Software
- Auxiliary functions such as indenter tip correction, temperature drift correction, and reminders for daily inspection
- Operability cultivated through many years of experience
5. Data reproducibility
- Data reproducibility is improved with a mechanism that suppresses the effects of disturbances such as vibration and temperature changes.
- Stable data acquisition is possible even in continuous measurement
6. Maintainability
- Easy replacement of high load unit and low load unit
- Equipment downtime is reduced by calibrating equipment by exchanging units.
Load unit
High load unit measurement example [Fused quartz] (Test load: 100μN 9 times overlapping)
Low load unit measurement example [Resist] (Test load: 1μN 9 times overlapping)
▶ High load unit
- Testing from 5 μN to 2 N is possible.
- Compatible with hardness tests for a wide range of materials, from metallic materials to polymeric materials.
▶ Low load unit
- Corresponds to 0.5 μN to 10 mN.
- Soft materials (elastic modulus: several GPa or less) and
Excellent repeatability and stability can be obtained for measurements with an indentation depth of 10 nm or less.
- Functional resins such as UV curable resins, low-k films, elastic materials such as silicone rubber, and ultra-thin hard films such as DLC films
Suitable for mechanical property evaluation.
Measurement Example
Dynamic Test
It is possible to continuously acquire the hardness distribution in the indentation depth direction by performing the test while applying minute vibrations to the indenter.
- Sample: Quartz glass (blue), DLC film (red)
- Test result: Quartz glass shows almost constant hardness regardless of the indentation depth. On the other hand, in the case of the DLC sample, it can be seen that the hardness of the DLC film on the surface and the hardness of the base material change continuously while being affected by the base material.
Product Videos
Measure the hardness and elastic modulus of ultrathin films with nanometer-scale indentation: ENT-5
ELIONIX's ENT-5 is a nanoindentation tester capable of measuring the hardness and elastic modulus of thin films less than 1 micrometer thick. It features a wide range of measurement loads from 0.5 µN to 2 N, which includes the indentation load range of a Vickers hardness tester. The high-speed mapping function allows for measurements at a speed of up to 1 point per second. It can also measure the fracture and deformation strength of particles as small as a few micrometers. Creating analysis reports is also easy, with test results immediately exportable as CSV or PDF files.
Nanoindentation ENT-5 Standard Test Video
High data reproducibility achieved by suppressing external influences (temperature, vibration) in the measurement environment Reliable Japanese-made product supporting a wide test load range from 0.5μN to 2,000mN Capable of measuring various materials (thin film materials such as plating and hard coatings, resin materials, film-based materials, ultra-thin films like DLC, functional water-repellent coatings or surface-modified layers, fine particles or powder materials) Obtains mechanical properties such as hardness and elastic modulus for thin films, ultra-small surfaces, and micro-regions No indentation observation required to analyze load-displacement curves and derive characteristics Complies with ISO 14577-1 / JIS Z 2255